Very High Precision Spindle

CUSTOMER:
Semiconductor metrology systems builders
 
Very high resolution optical encoder and precision rotation allows very stable speed control.
 
Used for:
High precision electro-optical metrology systems used for semiconductor manufacturing processes inspection.
 
Main features and advantages
Smooth and precise air bearing
Super low run-out of rotating axis to 0.25 pm
“0” cogging electric motor design
Clean operation meets class 2 dean-room environment standard
Uses specially designed vacuum system to eliminate any air flow from bearing to the environment